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Optics at ASML, Sub-Wavelength Litho For The Next Generation Electronics

When
October 29, 2013
7:00 PM - 8:00 PM
Location
UR/LLE, East Lobby

Jerry Nijmeijer

ASML: Senior Mechatronic Architect

Abstract:

ASML is the leading supplier of lithographic equipment in the world and as such one of the drivers behind the ever-continuing shrink in semiconductor manufacturing. This talk will give a brief overview of the world ASML is operating in and what the requirements are we are dealing with. From there it will go into where optics and optical design is used in the design and use of litho tools and the challenges that comes with. One specific sensor system developed in Wilton will be presented in more detail to get a sense to what extend optics are involved in the design process.

Biography:

Jerry Nijmeijer is a Sr. Architect at ASML in Wilton, CT. He has worked for ASML for 17 years. He graduated in Applied Physics, specialized in Applied Optics, at the University of Twente in the Netherlands. After a short period at the University of Milan (Italy) he started work at ASML Veldhoven in 1996. In 2006 he relocated to Wilton to become part of the US Development Organisation of ASML. His main involvement at ASML has been in the development of sensor systems to measure wafer position for different machine platforms (EUV, dry, immersion). He is co-inventor on a number of patents securing the technology for these sensor systems.